??產(chǎn)品介紹:
BROOKS AUTOMATION 001-4130-03晶圓矯正控制器。
其主要目的是通過高精度的定位和校準(zhǔn)技術(shù)來確保晶圓的位置及方向準(zhǔn)確
從而為后續(xù)工藝提供基礎(chǔ)
產(chǎn)品應(yīng)用:
廣泛應(yīng)用于半導(dǎo)體制造過程的各個階段,包括晶圓加工、傳輸、檢測等。
可集成至各類半導(dǎo)體設(shè)備中使用,如晶圓傳片設(shè)備、晶圓研磨機(jī)等。
產(chǎn)品特性:
高精度校準(zhǔn):采用微型單軸機(jī)器人模組或高精度圖像識別傳感器等技術(shù),實(shí)現(xiàn)高速、高精度的晶圓校準(zhǔn)。例如,某些型號的晶圓校準(zhǔn)器能在3秒內(nèi)定位晶圓中心,位置精度達(dá)到±0.1mm,晶圓缺邊/缺口角度精度達(dá)到±0.1°。
高效性:能夠快速完成晶圓中心與角度等補(bǔ)正動作,同時達(dá)成定位。
多功能性:配備高性能光學(xué)傳感器,支持透明、半透明與不透明等物件的輪廓偵測功能,適用于不同尺寸(如100-300mm)的晶圓及玻璃等。
高潔凈度:適用于半導(dǎo)體、光電等高潔凈度環(huán)境,潔凈等級達(dá)ISO標(biāo)準(zhǔn)Class 1或Class 2。
實(shí)時監(jiān)控與安全性:配備即時監(jiān)控功能,可實(shí)時檢測馬達(dá)驅(qū)控系統(tǒng)、感測系統(tǒng)、真空系統(tǒng)、循環(huán)系統(tǒng)等系統(tǒng)狀態(tài),并提供緊急停止功能以確保使用安全。

001-4130-03
產(chǎn)品組成:
通常由潔凈大氣機(jī)械手、晶圓載物臺、晶圓對準(zhǔn)器、視覺系統(tǒng)、控制系統(tǒng)、空氣過濾器等組成一個高潔凈度的運(yùn)行空間。
產(chǎn)品優(yōu)勢:
立自主知識產(chǎn)權(quán)的直線型單臂機(jī)械手,具有高可靠性、高穩(wěn)定性。
設(shè)備配有FFU,采用全封閉結(jié)構(gòu),可發(fā)揮超潔凈性能。
可實(shí)現(xiàn)對晶圓缺口的檢測并依據(jù)缺口位置對晶圓進(jìn)行定位。
配備CCD傳感器及圖像處理軟件,可對晶圓ID刻號進(jìn)行識別與讀取。
??英語介紹:
BROOKS AUTOMATION 001-4130-03 Wafer alignment controller.
Its main purpose is to ensure the accurate position and orientation of the wafer through high-precision positioning and calibration technology
Thus provide the basis for the subsequent process
Product Application:
It is widely used in all stages of semiconductor manufacturing process, including wafer processing, transmission, inspection, etc.
It can be integrated into various semiconductor devices, such as wafer transfer equipment, wafer grinding machines, etc.
Product features:
High-precision calibration: The use of micro-single-axis robot modules or high-precision image recognition sensors and other technologies to achieve high-speed, high-precision wafer calibration. For example, some models of wafer calibrators can locate the wafer center within 3 seconds with a position accuracy of ±0.1mm and wafer edge/notch Angle accuracy of ±0.1°.
High efficiency: Can quickly complete the wafer center and Angle and other corrective actions, while achieving positioning.
Versatility: Equipped with high-performance optical sensors to support contour detection of transparent, translucent and opaque objects, suitable for wafers and glass of different sizes (such as 100-300mm).
High cleanliness: Suitable for semiconductor, photoelectric and other high cleanliness environment, cleanliness level up to ISO standard Class 1 or Class 2.
Real-time monitoring and safety: Equipped with real-time monitoring function, can detect the motor drive control system, sensing system, vacuum system, circulation system and other system status in real time, and provide emergency stop function to ensure safety.

001-4130-03
Product composition:
It is usually composed of a clean air manipulator, wafer carrier, wafer aligner, vision system, control system, air filter, etc., to form a high cleanliness operating space.
Product advantages:
The linear single-arm manipulator with independent intellectual property rights has high reliability and stability.
The equipment is equipped with FFU and adopts a fully enclosed structure for ultra-clean performance.
Wafer notch detection and wafer positioning based on the notch location can be achieved.
Equipped with CCD sensor and image processing software, it can recognize and read the wafer ID marking.
??關(guān)于成都陽光熹禾
成都陽光熹禾電氣有限公司專業(yè)銷售世界各大電氣品牌產(chǎn)品產(chǎn)品海外直接采購,正品庫存,價格優(yōu)惠售后保修,型號齊全,一樣的產(chǎn)品,不一樣的價格與服務(wù)。
大量供應(yīng)原裝進(jìn)口DCS系統(tǒng)配件,PLC系統(tǒng)配件。
主營:ABB、GE發(fā)那科、Bentl本特利、Triconex英維思、Woodward伍德沃德、Foxboro??怂共_、Westinghouse西屋/Emerson艾默生、
Reliance瑞恩、SchneiderModicon施耐德莫迪康、A-B、HIMA黑馬、Motorola摩托羅拉、Kollmorgen科爾摩根Bosch/Rexroth/博世力上樂,
NI,YOKOGAWA橫河,等各大品牌的DCS系統(tǒng)配件,機(jī)器人系統(tǒng)配件,大型伺服系統(tǒng)停產(chǎn)備件。
??與我們聯(lián)系
銷售經(jīng)理:BeiLin
|手機(jī)/微信:+86 18005021035
Email:18005021035@163.com
地址:成都高新區(qū)天益街北巷52號附14號2層
?? 提供服務(wù)?
長期在線:24小時在線
包裝:包裝是工廠密封(原裝)
送貨合作伙伴:通過TNT,F(xiàn)EDEX,SF,DHL等。
提供保修:12個月 客戶收到貨物后的保修。
?常見問題解答
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